Process for formation of metal oxide film
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsKatsuya Tanitsu, Muneo Nakayama, Yoshimi Sato
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Abstract
A process for the formation of a metal oxide film on a substrate by coating the substrate with a coating solution and heating the substrate to a temperature of at least 100.degree. C. The coating solution is composed of (a) a .beta.-diketone, (b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said .beta.-diketone, salts of the elements and hydrolysates of alkoxides of the elements, and (c) an aprotic polar solvent. As an alternative, it is composed of a metal complex of a .beta.-diketone and an aprotic polar solvent.
Claims2
A process for the formation of a metal oxide film, which comprises the following consecutive steps:
- (i) coating a substrate with a coating solution for use in the formation of the metal oxide film, said solution comprising:
- (a) a .beta.-diketone;
- (b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said .beta.-diketone, salts of the elements and hydrolysates of alkoxides of the elements;
- and
- (c) an aprotic polar solvent;
- and
- (ii) subjecting the thus-coated substrate to a heat treatment at a temperature of at least 100.degree. C.
Dependencies are inferred from the claim text.