Mass flow stabilized
AssigneeTegal Corporation
InventorJohn P. Zajac
Life of this patent
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Abstract
A mass flow stabilizer utilizes a restriction and a chamber for the dampening of pressure fluctuations between a gas pressure regulator and a mass flow controller.
Claims2
In a gas delivery system wherein a mass flow controller is connected in a gas line between a source of gas and a device in which the gas is used, the improvement comprising a mass flow stabilizer interposed in said line for dampening small pressure fluctuations, said mass flow stabilizer comprising restriction means connected to said source, wherein said restriction means is characterized by a flow rate slightly greater than that of said mass flow controller, and chamber means connected to said restriction means and said mass flow controller.
In a gas delivery system wherein a mass flow controller is connected in a gas line between a source of gas and a device in which the gas is used, the improvement comprising a mass flow stabilizer interposed in said line for dampening small pressure fluctuations, said mass flow stabilizer comprising restriction means connected to said source, and chamber means connected to said restriction means and said mass flow controller, wherein said chamber means has a volume equal to or greater than the volume of gas flowing through said mass flow controller in one minute.
Dependencies are inferred from the claim text.