Surface acoustic wave device
AssigneeSumitomo Electric Industries, Ltd.
InventorsTakahiro Imai, Hideaki Nakahata, Naoji Fujimori
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Abstract
A surface acoustic wave device which comprises a piezoelectric layer, a carbonaceous layer which is selected from the group consisting of a diamond layer and a diamond-like carbon layer and formed on at least one surface of the piezoelectric layer, and at least a pair of interdigital transducer electrodes, can be used in an extremely high frequency region.
Claims12
A surface acoustic wave device which comprises a piezoelectric layer, a carbonaceous layer which is selected from the group consisting of a diamond layer and a diamond-like carbon layer and formed on at least one surface of the piezoelectric layer, and at least a pair of interdigital transducer electrodes.
Dependencies are inferred from the claim text.