Method for fabricating superconducting oxide thin films by activated reactive evaporation
AssigneeHitachi, Ltd.
InventorsYukio Okamoto, Toshiyuki Aida, Katsuki Miyauchi, Kazumasa Takagi, Tokuumi Fukazawa, Shinji Takayama
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Abstract
A process for fabricating a superconducting oxide thin film is disclosed which comprises the steps of separately evaporating metal elements, of which the superconducting oxide thin film with a desired stoichiometry is to be composed, to a substrate and simultaneously irradiating the substrate with oxygen plasma generated by RF wave or ECR microwave to form a crystalline oxide film without further annealing.
Claims4
A method for fabricating a ceramic oxide superconducting thin film, comprising the steps of applying a mixture of vapor of metal elements, of which the superconducting thin film is to be composed, said vapor begin generated in an evaporation chamber evacuated to a high vacuum by a differential pumping mechanism, and a plasma gas containing oxygen ions generated in a plasma chamber separated from said evaporation chamber to a substrate, wherein said evaporation chamber is evacuated to a high vacuum higher than that of said plasma chamber;
- and reacting said vapor and said gas with each other on said substrate in a reaction chamber to grow a superconductive thin film by crystallization without further annealing.
A method for fabricating a ceramic oxide superconducting, thin film comprising the steps of:
- preparing a stream of vapor of the plural metal elements of which the superconductive material is to be composed in a vacuum chamber;
- forming oxygen plasma ions within said chamber using an electron cyclotron resonance microwave plasma generator;
- and
- directing said stream of vapor of the plural metal elements onto a substrate in an atmosphere of said oxygen plasma ions so that said plural metal elements and said oxygen plasma ions react on the surface of the substrate to form a thin film of the ceramic oxide superconducting material without requiring post-heat treatment.
Dependencies are inferred from the claim text.