Back to results
US 4,947,881 AGranted
Method of cleaning using hydrochlorofluorocarbons
AssigneeAllied-Signal Inc.
InventorsHillel Magid, Richard E. Eibeck, Michael Van Der Puy, Chien C. Li
Life of this patent
Estimating the term…
Abstract
A method of cleaning a surface of a substrate is provided. The method comprises treating the surface with a solvent comprising a compound of the formula CH.sub.a Cl.sub.b F.sub.c (CF.sub.2).sub.d CH.sub.e Cl.sub.f F.sub.g wherein a+e ranges from 1 to 4, b+f equals 2, c+g ranges from 0 to 3, d is from 1 to 4, a+b+c=3, and e+f+g-3.
Claims21
A method of cleaning a surface of a substrate which comprises treating said surface with a solvent comprising a compound of the formula
- CH.sub.a Cl.sub.b F.sub.c (CF.sub.2).sub.d CH.sub.e Cl.sub.f F.sub.g
- wherein a+e ranges from 1 to 4, b+f equals 2, c+g ranges from 0 to 3, d is from 1 to 4, a+b+c=3, and e+f+g=3, said solvent being a solvent for contaminants on said surface and said treatment removing said contaminants from said surface.
Dependencies are inferred from the claim text.