Positive radiation-sensitive mixture and radiation-sensitive recording material produced therefrom
AssigneeHoechst Aktiengesellschaft
InventorsKarl-Friedrich Doessel, Ralph Dammel, Juergen Lingnau
Life of this patent
Estimating the term…
Abstract
A positive radiation-sensitive mixture is disclosed comprising a compound which forms an acid under the action of actinic radiation, and an acid-cleavable compound, the acid-cleavable compound producing, as cleavage product, an aromatically-substituted alcohol of the general formula I. The radiation-sensitive mixture according to the invention exhibits a wide processing latitude since different holding times do not cause any changes with respect to the development times. A high structural resolution is obtained with various developers ##STR1##
Claims14
A positive radiation-sensitive mixture comprising:
- a compound which forms an acid under the action of actinic radiation;
- and
- an acid-cleavable acetal or ketal compound;
- wherein a compound of the formula I ##STR6## in which R denotes hydrogen or alkyl,
- R.sub.1 and R.sub.2 may be identical or different and denote hydrogen, hydroxyl, halogen, cyano, nitro, alkyl, alkoxy, aryl or substituted carbonyl,
- or
- R.sub.1 and R.sub.2 together form a ring,
- n denotes 1 to 3,
- is formed as a cleavage product.
Dependencies are inferred from the claim text.