Microchannel plates formed with deposition using non-reactive gas
AssigneeU.S. Philips Corporation
InventorsJohn L. Phillips, Robert P. Ball
Life of this patent
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Abstract
A method is provided for depositing a conducting electrode on the output face of a microchannel plate and into the output end of each channel. The electrode is vapor deposited by a method which ensures that the material impinges on the output face from random angles relative to the axis of each channel. A layer (10) of tapering thickness is formed down each channel. When used in an image intensifier tube, for example, the output beam of electrons from each channel is more collimated and the resolution of the tube is improved.
Claims22
A method of providing an output electrode on a microchannel plate comprising depositing a conducting electrode material as a layer onto an output face of the microchannel plate and into the output end of each channel, characterised in that electrode material provided by a deposition source is arranged to impinge on the output face and output end of each channel from random angles relative to the axis of each microchannel.
A method of providing an output electrode on a microchannel plate comprising depositing a conducting electrode material as a layer onto the output face of the microchannel plate and into the output end of each channel, characterised in that the deposition takes place by evaporation in a vacuum chamber containing a non-reactive gas.
A method as providing an output electrode on a glass microchannel plate comprising depositing a conducting electrode material as a layer into the output face of the microchannel plate and into the output end of each channel, characterized in that the deposition takes place in a vacuum chamber by sputtering of the electrode material in an inert gas.
A microchannel plate having an output electrode which extends into the output end of each channel, the output electrode comprising a conductive layer characterized in that the thickness of the conductive layer within the output end of each channel is a continuously tapering function of the distance into the channel such that the thickness decreases with increasing penetration into the channel, said conductive layer forming exterior surfaces of said output end of each channel and exterior surfaces within each channel.
Dependencies are inferred from the claim text.