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US 4,937,226 AGranted
Method for producing a small superconducting solenoid
AssigneeSumitomo Electric Industries, Ltd.
InventorMasanori Nishiguchi
Life of this patent
Estimating the term…
Abstract
A large number of small superconducting solenoids are produced on a common substrate simultaneously. Two parallel slits (5) passing through a silicon wafer are dug in such manner that a core (10) is left between the slits and then a superconducting thin film of compound oxide is deposited around the core (10).
Claims12
A method for producing a small superconducting solenoid by the steps comprising:
- providing a substrate of material which material will function as a solenoid core;
- etching at least two slits each slit having walls and each slit passing through the substrate to form a core which core is defined by the portion of the substrate between two adjacent slits;
- and then depositing a thin film of superconducting material of compound oxide including copper on at least predetermined portions of upper and lower surfaces of said substrate and on walls of said slits by physical vapour deposition technique so that a ring-shaped superconducting thin film is formed about said core.
Dependencies are inferred from the claim text.