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US 4,931,169 AGranted
Apparatus for coating a substrate with dielectrics
AssigneeLeybold Aktiengesellschaft
InventorsMichael Scherer, Rudolf Latz, Ulrich Patz
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AssigneeLeybold Aktiengesellschaft
InventorsMichael Scherer, Rudolf Latz, Ulrich Patz
Estimating the term…
The invention relates to an apparatus for coating a substrate (1) with dielectrics which has a dc current source (10) connected to an electrode (5) which is connected to a target (3) which is being sputtered. The sputtered particles of the target (3) form a compound with an introduced substance which is deposited on the substrate (1). Permeating the target (3) are toroidal maganetic fields whose field lines emerge in the region of magnetic poles from the surface of the target (3). Under the invention an ac voltage source (30) is provided whose output voltage is superimposed on the dc voltage of the dc current source (10). Here, the electrical output of the ac current source (30) which is supplied to the electrode (5) corresponds to 5% to 25% of the output supplied by the dc current source (10) to the electrode (5).
An improved apparatus for coating a substrate with dielectrics, the apparatus having a dc voltage source which is connected to an electrode which in turn is connected to a target which is sputtered and whose sputtered particles form a compound with an introduced substance, the compound being deposited on the substrate, the apparatus further having toroidal magnetic fields permeating the target with field lines emerging in the region of the magnetic poles from the surface of the target, the improvement comprising:
Dependencies are inferred from the claim text.