Pumping system for a leak detecting device
AssigneeLeybold Aktiengesellschaft
InventorsGunter Reich, William Worthington
Life of this patent
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Abstract
Leak detecting device working on the counter current principle uses a test piece connected to the inlet of a first turbomolecular pump, a gas detector connected to the inlet of a second turbomolecular pump. First and second molecular pumps downstream of the respective turbomolecular pumps have a common outlet connected to a pre-vacuum pump and reduce the effect of test gas substratum. Both turbomolecular and other molecular pumps are on a common shaft, the passages between each turbomolecular and molecular pumping stage being connected.
Claims9
Pumping system for a leak detecting device for detecting a gas leaking from test piece by means of a gas detector and operating on the counter current principle, said system comprising
- a shaft;
- a first turbomolecular pumping stage on said shaft and having an inlet, to which said test piece is connected;
- a first molecular pumping stage on said shaft downstream of said first turbomolecular pumping stage and connected thereto by a first passage and having an outlet;
- a second turbomulecular pumping stage on said shaft and having an inlet, to which said gas detector is connected;
- a second molecular pumping stage on said shaft downstream of said second turbomolecular pumping stage and connected thereto by a second passage and having an outlet in common with the outlet of the first molecular pumping stage;
- a connection between said first and second passages;
- a pre-vacuum pump having an inlet connected to the common outlet of the molecular pumping stages.
Dependencies are inferred from the claim text.