Crystal ingot lifting load measuring device
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsNobuo Katsuoka, Kouji Mizuishi, Yoshihiro Hirano, Kenichi Sato, Seiichiro Otsuka
Life of this patent
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Abstract
A load measuring device for measuring the pulling up load of a monocystalline rod (38) grown by the Czochralski method utilizes a strain gauge (20). The monocrystalline rod (38) is pulled up by wire rope (36) consisting of multiple strands. The pulley (34) guiding the wire rope between a drum (36) and a crystal holder (44) has a guide groove which has a cross-sectional shape which is substantially identical to a semicircle circumscribing the wire rope.
Claims7
A device for measuring the lifting up load of a crystal rod grown by the Czochralski method, comprising:
- a wire rope consisting of multiple strands, said wire rope having one end connected to said crystal rod through a seed crystal holder to lift up said crystal rod;
- a motor;
- a drum driven by said motor, having a helical groove formed in the peripheral surface of said drum for winding and guiding said wire rope, the remaining end of said wire rope connected to said drum;
- a first base;
- a load cell mounted to said first base;
- a second base supported by said first base through said load cell;
- and
- a pulley rotatably supported by said second base, said pulley having a guide groove formed in a peripheral surface thereof for guiding said wire rope between said drum and said crystal holder, a part of the cross-sectional shape of said guide groove being substantially identical to a semicircle circumscribing said wire rope.
Dependencies are inferred from the claim text.