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US 4,912,883 AGranted
Lapping control system for magnetic transducers
AssigneeInternational Business Machines Corporation
InventorsMike Y. Chang, Mark A. Church, Michael P. Salo
Life of this patent
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Abstract
A lapping control system for a row of thin film magnetic transducers formed on a substrate. Each of the rows comprises a plurality of thin film magnetic transducers and at least two test structures. Each test structure has at least two elements which comprises some combination of switch elements or test thin film magnetic transducers. As the row of transducers is lapped, each time one of the switch elements is opened, the saturation current (ISAT) of one or more of the thin film magnetic transducers is measured and recorded so that a correlation between ISAT and throat height of the transducers is established during lapping. This correlation is used to establish the point at which lapping should be terminated.
Claims17
A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers comprising:
- a row of product thin film magnetic transducers formed on a substrate, said row comprising a height defining edge and at least two spaced test structures, each of said test structures comprising a combination of at least two elements each offset a predetermined amount from said height defining edge of said row, said first of said at least two elements comprising a switch structure and the second of at least two elements comprising either another switch structure or a test thin film magnetic transducer;
- means for mounting said row of product thin film magnetic transducers in a position to lap said height defining edge of each of said thin film magnetic transducers and said test structures;
- means for producing a current flow through at least one of said thin film magnetic transducers, and means for measuring the saturation current of said thin film magnetic transducers during lapping of said height defining edge;
- means for recording the value of saturation current for at least one thin film magnetic transducer each time a switch for the associated test structure is opened so that a correlation between throat height and saturation current of said thin film magnetic transducers can be determined based on the measured values and the known offset position of said switches of said test structure;
- and
- means responsive to the measured saturation current for controlling the degree of lapping for said row and for terminating said lapping process when a predetermined throat height is reached for said product thin film magnetic transducers based on the correlation established between saturation current and throat height during lapping.
3 more elements
A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers comprising:
- a row of product thin film magnetic transducers formed on a substrate, said row comprising a height defining edge and at least two spaced test structures, each of said test structures comprising at least a first and a second switch structure each offset a different predetermined amount from said height defining edge of said row;
- means for mounting said row of product thin film magnetic transducers in a position to lap said height defining edge of each of said thin film magnetic transducers and said test structures;
- means for producing a current flow through at least one of said thin film magnetic transducers, and means for measuring the saturation current of said thin film magnetic transducers during lapping of said height defining edge;
- means for recording the value of saturation current for at least one of said thin film magnetic transducers each time a switch for the associated test structure is opened so that a correlation between throat height and saturation current of said thin film magnetic transducers can be determined based on the measured values and the known offset position of said switches of said test structure;
- and
- means responsive to the measured saturation current for controlling the degree of lapping for said row and for terminating said lapping process when a predetermined throat height is reached for said product thin film magnetic transducers based on the correlation established between saturation current and throat height during lapping.
3 more elements
A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers comprising:
- a row of product thin film magnetic transducers formed on a substrate, said row comprising a height defining edge and at least two spaced test structures, each of said test structures comprising at least one switch structure offset a predetermined amount from said height defining edge of said row and at least one test thin film magnetic transducer also offset from said height defining edge of said row;
- means for mounting said row of product thin film magnetic transducers in a position to lap said height defining edge of each of said thin film magnetic transducers and said test structures;
- means for producing a current flow through at least one of said product thin film magnetic transducers, and means for measuring the saturation current of said thin film magnetic transducers during lapping of said height defining edge;
- means for recording the value of saturation current for said thin film magnetic transducer and said test thin film magnetic transducer each time a switch for the associated test structure is opened so that a correlation between throat height and saturation current of said thin film magnetic transducers can be determined based on the measured values and the known offset position of said switches of said test structure;
- and
- means responsive to the measured saturation current for controlling the degree of lapping for said row and for terminating said lapping process when a predetermined throat height is reached for said thin film magnetic transducers based on the correlation established between saturation current and throat height during lapping.
3 more elements
A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers comprising:
- a row of product thin film magnetic transducers formed on a substrate, said row comprising a height defining edge and at least two spaced test structures, each of said test structures comprising at least a first and a second switch structure each offset a different predetermined amount from said height defining edge and at least one test thin film magnetic transducer offset from said height defining edge;
- means for mounting said row of product thin film magnetic transducers in a position to lap said height defining edge of each of said thin film magnetic transducers and said test structures;
- means for producing a current flow through at least one of said thin film magnetic transducers, and means for measuring the saturation current of said thin film magnetic transducers during lapping of said height defining edge;
- means for recording the value of saturation current for said thin film magnetic transducer and said test thin film magnetic transducer each time a switch for the associated test structure is opened so that a correlation between throat height and saturation current of said thin film magnetic transducers can be determined based on the measured values and the known offset position of said switches and said test transducer of said test structure;
- and
- means responsive to the measured saturation current for controlling the degree of lapping for said row and for terminating said lapping process when a predetermined throat height is reached for said product thin film magnetic transducers based on the correlation established between saturation current and throat height during lapping.
3 more elements
Dependencies are inferred from the claim text.