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US 4,908,585 AGranted
RF transformer and diagnostic technique therefor
OwnerPeter P. Chenauskyinventor
Life of this patent
Estimating the term…
Abstract
An RF transformer employs at least three elongated conductive elements in generally parallel spaced relationship. At least a first inductive element is connected between a pair of the conductive elements to provide a desired field distribution. A diagnostic technique for determining the frequency shift of the transformer employs a perturbing object which is selectively longitudinally positioned within the transformer. The transformer has particular utility as an RF excited gas laser.
Claims18
A gas laser having an RF transformer, said transformer comprising:
- first conductor means, said first conductor means having an axially extending electrically conductive surface portion and being electrically grounded;
- second conductor means, said second conductor means having an axially extending electrically conductive surface portion;
- third conductor means, said third conductor means having a electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C.sub.x, said third conductor means also at least in part defining an exterior capacitance C.sub.L ;
- means supporting said second conductor means such that the surface portion thereof is intermediate the surface portions of said first and third conductor means whereby said second conductor means divides said capacitance C.sub.x into a pair of capacitances C.sub.A and C.sub.B ;
- fourth conductor means for defining an axially extending space within said exterior capacitance C.sub.L between said third and fourth conductor means wherein the laser gas is disposed;
- at least one of said third conductor means and said fourth conductor means comprising a plurality of axially spaced, transversely extending plates;
- at least a first inductive element connected between a pair of said conductor means;
- and
- means for applying an RF voltage between said first and second conductor means, the frequency of said RF voltage being chosen to coincide with a minimum voltage standing wave ratio of the transformer input impedance.
6 more elements
An RF gas laser having an RF transformer, said transformer comprising:
- first conductor means, conductor means having an axially extending electrically conductive surface portion and being electrically grounded;
- second conductor means, said second conductor means having an axially extending electrically conductive surface portion;
- third conductor means, said third conductor means having an electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C.sub.x, said third conductor means also at least in part defining an exterior capacitance C.sub.L to ground;
- means supporting said second conductor means such that the said surface portion thereof is intermediate to said surface portions of said first and third conductor means, said second conductor means dividing said capacitance C.sub.x into a pair of capacitances C.sub.A and C.sub.B;
- fourth conductor means for defining an axially extending region within capacitance C.sub.L, said fourth conductor means including an oppositely disposed discharge electrode with which cooperates with said third conductor means;
- at least one of said third conductor means and said oppositely disposed discharge electrode having a contoured portion which at least partially defines a discharge gap of predetermined shape within said region;
- at least a first inductive element connected between a pair of said conductor means;
- and
- means for applying an RF voltage between said first and second conductor means, the frequency of said RF voltage being chosen to provide a minimum voltage standing wave ratio of the laser input impedance.
6 more elements
An RF excited gas laser having an RF transformer, said transformer comprising:
- first conductor means, said first conductor means having an axially extending electrically conductive surface portion and being electrically grounded;
- second conductor means, said second conductor means having an axially extending electrically conductive surface portion;
- third conductor means, said third conductor means having a electrically conductive surface portion, said third conductor means surface portion being spatially displaced from said first conductor means surface portion, said first and third conductor means surface portions cooperating to define therebetween an interior capacitance C.sub.x, said third conductor means also at least in part defining an exterior capacitance C.sub.L;
- means supporting said second conductor means such that the surface portion thereof is intermediate the surface portions of said first and third conductor means whereby said second conductor means divides said capacitance C.sub.x into a pair of capacitances C.sub.A and C.sub.B;
- fourth conductor means for defining an axially extending space within said exterior capacitance C.sub.L, said fourth conductor means being electrically grounded;
- at least a first inductive element connected between a pair of said conductor means;
- means for confining a gas in said axially extending space,
- means for applying an RF voltage between said first and second conductor means to initiate a discharge in said gas, the frequency of said RF voltage being chosen to coincide with a minimum voltage standing wave ratio of the transformer input impedance;
- and
- means for coupling a source of current to said third conductor means to supply electrical power to the discharge.
7 more elements
Dependencies are inferred from the claim text.