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US 4,908,568 AGranted
Mechanical probe for optical measurement of electrical potentials
AssigneeSiemens Aktiengesellschaft
InventorSoelkner Gerald
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AssigneeSiemens Aktiengesellschaft
InventorSoelkner Gerald
Estimating the term…
A mechanical probe for optical measurement of electrical potentials. The probe of the present invention is composed of a cubic, electro-optical crystal fashioned in the form of a tip and of a metallization which is at ground potential and which covers the crystal with the exception of those surface regions located immediately opposite a measuring location, for example an interconnect of an integrated circuit. Since the metallization acting as a cooperating electrode significantly facilitates the penetration of the electrical stray field into the crystal tip, geometry-dependent effects and influences of electrical microfields are nearly completely supressed. The probe therefore makes it possible to utilize the voltage difference instead of the topography-dependent field difference for optical measurement of electrical signals with high chronological resolution.
A mechanical probe for optical measurement of electrical potentials and having an electro-optical crystal which is located immediately above a subject surface and which is penetrated by a light ray, comprising a cubic crystal fashioned in the form of a tip having an electrode located on a surface thereof in the region of the tip.
A mechanical probe for optical measurement of electrical potentials and having an electro-optical crystal which is located immediately above a specimen subject and which is penetrated by a light ray, comprising:
Dependencies are inferred from the claim text.