Heating lamp assembly for ccvd reactors
AssigneeTexas Instruments Incorporated
InventorsKaoru Ishii, Thomas F. Wilkinson, Stephen J. Dwyer, Rick Cooper
Life of this patent
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Abstract
A heating lamp assembly for use with semiconductor reactors has a reflector assembly constructed of tubes joined together by heat conductive spacers to provide for water cooling of the reflector assembly, has mounting pins for providing variable spacing of heating lamps, and water manifolds on each side of the reflector assembly for directing water through the cooling tubes. One or more blocking gates are mounted on the lamp mounting pins to direct cooling air flow across the heating lamps.
Claims19
A heating lamp assembly for use with semiconductor reactors comprising:
- a housing;
- a reflector assembly within said housing;
- a plurality of cooling tubes within said reflector assembly for cooling said reflector assembly;
- a plurality of heat conductive spacers joining said tubes together;
- heat lamp mounting assemblies on two sides of said reflector assembly;
- and at least one heating lamp secured to said heat lamp mounting assemblies.
A heating lamp assembly for use with semiconductor reactors comprising:
- a housing;
- a reflector assembly within said housing;
- water manifolds joined to a plurality of cooling tubes within said reflector assembly for allowing cooling water to flow through said reflector assembly;
- a plurality of heat conductive spacers joining said tubes together;
- heat lamp mounting assemblies on two sides under said reflector assembly;
- and at least one heating lamp secured to said heat lamp mounting assemblies adjacent the reflector assembly.
A heating lamp assembly for use with semiconductor reactors comprising:
- a housing;
- a reflector assembly within said housing;
- water manifolds joined to two ends of said reflector assembly for allowing cooling water to flow through said reflector assembly;
- heat lamp mounting assembles on two sides under said reflector assembly;
- at least one heating lamp secured to said heat lamp mounting assemblies adjacent the reflector assembly;
- and
- block gates mounted on the heat lamp mounting assemblies to direct cooling across said at least one heating lamp;
- and
- at least one heating lamp secured to said heat lamp mounting assemblies adjacent the reflector assembly.
Dependencies are inferred from the claim text.