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US 4,908,492 AGranted
Microwave plasma production apparatus
AssigneeHitachi, Ltd.
InventorsYukio Okamoto, Seiichi Murayama
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Abstract
A microwave plasma production apparatus according to the present invention is so configured that a cylindrical coaxial wave guide is formed by a cylindrical outer conductor and a helical coil shaped inner conductor, and at least a part of a nonconductive discharge tube is disposed inside said inner conductor, microwave being applied between said outer conductor and said inner conductor.
Claims5
A microwave plasma production apparatus comprising:
- a cylindrical coaxial wave guide forming a cylindrical bore and including a helical coil shaped inner conductor and a cylindrical outer conductor;
- an electrically nonconductive discharge tube disposed in said cylindrical bore;
- and
- means for introducing microwave power between said inner and outer conductors and for forming a microwave electric field in said cylindrical bore so as to form plasma of a substance to be ionized introduced in said cylindrical bore.
1 more element
Dependencies are inferred from the claim text.