Method of making an electrophotographic inorganic photosensitive element using ultraviolet radiation
AssigneeRicoh Company, Ltd.
InventorsYukio Ide, Kohichi Ohshima, Itaru Fujimura, Yoshiyuki Kageyama
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Abstract
A method and apparatus of manufacturing a photosensitive member including an electrically conductive support and a photoconductive layer formed on said support for use in electrophotography is characterized by including the steps of introducing a reacting gas containing predetermined components for forming said photoconductive layer on said support into said reaction chamber and irradiating ultraviolet light to activate said predetermined components while maintaining said support at a predetermined temperature thereby causing said predetermined components to be deposited onto said support.
Claims13
A method of manufacturing a photosensitive member including a substrate and a photoconductive layer formed on said substrate, comprising the steps of:
- placing said substrate in a reaction chamber having a preheating region and a photoexcitation region, said substrate being placed in said photoexcitation region;
- introducing a reacting gas containing predetermined components for forming said photoconductive layer on said substrate into said reaction chamber first through said preheating region for preheating said reacting gas and then through said photoexcitation region;
- and
- irradiating ultraviolet light in said photoexcitation region to activate said predetermined components while maintaining said substrate at a predetermined temperature level thereby causing said predetermined components to deposit on said substrate by photochemical reaction.
A method of manufacturing a photosensitive member including a substrate and a photoconductive layer formed on said substrate, comprising the steps of:
- placing said substrate in a reaction chamber;
- introducing a reacting gas containing predetermined components for forming said photoconductive layer on said substrate into said reaction chamber;
- and
- irradiating ultraviolet light from the exterior of said reaction chamber to activate said predetermined components while maintaining said substrate at a predetermined temperature and at the same time directing a purge gas at least against a selected portion of the inner surface of a wall defining said reaction chamber, through which said ultraviolet light passes, to keep said selected portion free of deposition, thereby causing said predetermined components to deposit on said substrate.
Dependencies are inferred from the claim text.