Process and device for igniting an arc with a conducting plasma channel
AssigneeHauzer Holding B.V.
InventorBoudewijn J. A. M. Buil
Life of this patent
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Abstract
Process and device for creating a conducting channel for igniting of an arc in an environment with reduced pressure by means of high voltage. During ignition the conditions for ignition of the arc are optimized at a number of points between the parts where the arc has to be ignited. This optimization can comprise increasing of pressure and/or adding ignition-promoting gases.
Claims44
A process for igniting an electric arc between an anode element and a cathode element in an environment of subatmospheric pressure, said arc acting to evaporate material of which the cathode element is made for deposition on a substrate, comprising the steps of:
- (a) locally and temporarily increasing gas pressure in an area of said environment surrounding an anode element and said cathode element, and
- (b) inducing an electrical discharge for only sufficient time to generate ignition of an arc between said anode and cathode element and thereafter discontinuing the increase of said pressure.
A device for igniting an electric arc between an anode element and a cathode element positioned in a chamber having an environment of subatmospheric pressure comprising
- (a) means for temporarily locally increasing gas pressure in an area of said chamber environment surrounding an anode element and a cathode element and,
- (b) means for inducing an electrical discharge for only sufficient time to generate ignition of the arc between said anode and cathode elements an thereafter discontinuing the increase of said pressure.
Dependencies are inferred from the claim text.