Semiconductor device manufacturing methods
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
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Abstract
In a photoelectric conversion device manufacturing method which includes at least a step of forming a non-single-crystal semiconductor layer, a transparent or nontransparent layer, or a laminate member composed of transparent and nontransparent layers by patterning with a laser beam, a laser beam which has a short wavelength of 600 nm or less, a spot diameter of 3 to 60 nm and a width of 50 nano-second is used for the patterning.
Claims1
A method for patterning a transparent conductive layer disposed on a transparent insulating substrate comprising the step of irradiating said layer with a laser beam, said method characterized in that said transparent conductive layer is made of a sublimable conductive material selected from the group consisting of indium oxide, tin oxide and indium-tin oxide, that the thickness of said transparent conductive layer is one micron or less, and that said laser beam is emitted from an eximer laser, whereby said transparent conductive layer is formed into a plurality of electrically independent segments without damage to the transparent insulating substrate.
Dependencies are inferred from the claim text.