Method of making single-crystal mercury cadmium telluride layers
AssigneeSelenia Industrie Elettroniche Associate S.p.A.
InventorSergio Bernardi
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Abstract
A method of making symmetrical mercury cadmium telluride layers by epitaxial growth on a cadmium telluride substrate, performed inside a reactor with two communicating zones, kept at different and controlled temperatures. Growth solution is directly prepared inside the reactor by submitting to a specific thermal cycle a weighed tellurium quantity, a saturating cadmium telluride substrate and a mercury bath.
Claims6
A method of fabricating single-crystal mercury cadmium telluride layers by epitaxial growth on a cadmium telluride substrate, performed inside a reactor (TQ) with two communicating zones maintained at different and controlled temperatures, said method comprising the steps of:
- placing a weighed amount of tellurium in a well of a crucible placed inside the reactor (TQ) in a higher-temperature zone and melting the tellurium, the well being supplied with a semicover (CS) of cadmium telluride;
- placing a mercury bath (BM) inside the reactor in a lower-temperature zone and heating the mercury bath so as to obtain a mercury vapor atmosphere in the whole reactor;
- converting the molten tellurium by the absorption of vapor state mercury thereby, into a solution of mercury in tellurium and homogenizing the solution as an effect of thermal agitation at the higher temperature;
- rotating said crucible to bring the solution of mercury in tellurium into contact with the semicover (CS) for a time sufficient to saturate the solution at the higher temperature;
- rotating the crucible opposite to the preceding rotation to separate the saturated mercury and cadmium in tellurium solution from the semicover;
- slowly cooling the solution of mercury and cadmium in tellurium and the mercury bath so as to produce a solution supersaturation and keep the composition of the solution of mercury and cadmium in tellurium constant;
- and
- bringing a growth substrate (SS) into contact with the solution in supersaturation and carrying out an epitaxial growth of single-crystal mercury cadmium telluride on said substrate.
A method of forming an epitaxial layer of mercury-cadmium telluride upon a cadmium telluride substrate, comprising the steps of:
- (a) introducing a measured amount of tellurium into a well of a crucible having a slider closing a bottom of the well and a cadmium telluride cover partially closing a top of the well;
- (b) heating said crucible in a reactor to a relatively higher temperature sufficient to melt the tellurium in said well;
- (c) heating a mercury bath in said reactor and in communication with the crucible to a relatively lower temperature sufficient to generate a mercury vapor atmosphere in said reactor;
- (d) controlling said temperature so as to cause molten tellurium in said well to absorb mercury vapor from said atmosphere and form a homogeneous solution of mercury in tellurium at said higher temperature;
- (e) thereafter rotating said crucible to bring said solution into contact with said cover and maintaining contact between the cover and said solution until said solution is saturated with cadmium at said higher temperature, thereby forming a mercury-cadmium-tellurium solution;
- (f) then rotating said crucible to remove said solution from contact with said cover and position said mercury-cadmium-tellurium solution above said slider;
- (g) slowly cooling said crucible to supersaturate the mercury-cadmium-tellurium solution in said well while maintaining the composition of the mercury-cadmium-tellurium solution constant;
- (h) shifting said slider to contact said substrate with said mercury-cadmium-tellurium solution;
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- (i) maintaining said contact between said substrate and said mercury-cadmium-tellurium solution to effect epitaxial growth of a mercury-cadmium telluride layer on said substrate.
Dependencies are inferred from the claim text.