Membrane process for treatment of fluorinated hydrocarbon-laden gas streams

Abstract

A membrane process for separating fluorinated hydrocarbon vapors is disclosed. The process employs a permselective membrane that is selectively permeable to fluorinated hydrocarbons over oxygen or nitrogen. The process involves contacting the feed side of the membrane with a gas mixture containing the fluorinated hydrocarbon vapor, and withdrawing from the permeate side a vapor enriched in the fluorinated hydrocarbon component. The driving force for membrane permeation is preferably provided by maintaining a partial vacuum on the permeate of the membrane. Eighty to 99% of the fluorinated hydrocarbon contained in the feedstream can be removed by the process. The permeate may be sufficiently enriched in fluorinated hydrocarbon to permit recovery and reuse. Very high membrane selectivities are not required.

Dependencies are inferred from the claim text.