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AssigneeHitachi, Ltd.
InventorsHidemi Sato, Yasuo Hira, Shigeru Sasaki, Atsuko Fukusima, Kazumi Kawamoto
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This invention relates to a wave guide type optical device as an integrated optical device having formed thereon lens and grating having particularly high efficiency and a fabrication method thereof. The present invention is characterized in that a wave guide type optical device having high efficiency and high stability can be fabricated efficiently by forming a buffer layer made of a dielectric substance on a optical wave guide formed near the surface of a substrate having an acousto-optic effect, then forming a light wave control loading layer and finely working the loading layer and the buffer layer to a predetermined shape of a desired optical device.
A wave guide type optical device comprising a dielectric light wave control loading layer disposed on an optical wave guide formed near the surface of a substrate having an acoustooptic effect, and a buffer layer made of a dielectric formed between said optical wave guide and said loading layer.
A method of forming a wave guide type optical device having a dielectric light wave control loading layer on an optical wave guide path formed near the surface of a substrate having an acoustooptical effect comprising the steps of:
Dependencies are inferred from the claim text.