Vacuum chuck
AssigneeNikko Rica Corporation
InventorsMakoto Hiyamizu, Kazuhiro Nagashima, Yasuhiro Tani
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Abstract
The vacuum chuck, which is an accessory device for holding a workpiece in machining and inspection, has a suction head made of a porous sintered particles of a thermoplastic resin, e.g., a fluorocarbon resin, preferably, bonded to the chuck base. The suction head is free from the problem of unreliableness of holding of workpieces without the danger of damaging the workpiece. The outer peripheral surfaces of the sucking head are provided with an air-impermeable layer to increase the efficiency of suction by preventing leakage of vacuum. The water-and-oil-resistance of the suction head can be improved by blending the powder of the thermoplastic resin with a powder of a thermosetting resin, e.g., epoxy resin.
Claims19
A vacuum chuck which comprises a chuck base and a suction head formed of a porous body of sintered particles of a thermoplastic resin having open pores which serve as the vacuum ducts.
A vacuum chuck which comprises a chuck base and a flat suction head plate having peripheral side surfaces, said head plate being formed from sintered particles of a thermoplastic resin having open pores which serve as the vacuum ducts and wherein the peripheral surfaces have been rendered impermeable to air.
Dependencies are inferred from the claim text.