Mechanical sensor for high temperature environments
AssigneeSolartron Electronics, Inc.
InventorsPhillip W. Barth, Kurt E. Petersen
Life of this patent
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Abstract
A force or pressure sensor includes a monocrystalline silicon diaphragm coated with silicon dioxide upon which single crystalline silicon resistors are fused in a low profile pattern on the surface. The resistors are almost perfectly electrically isolated from each other and from the underlying silicon substrate. The structure is fabricated by forming resistors in a first wafer and then affixing that surface of the first wafer to the silicon dioxide layer on the second wafer. All of the first wafer except for the resistors has been removed, and metal contact capable of resisting elevated temperatures are formed to provide electrical connections to the resistors.
Claims11
A sensor comprising:
- a base having an opening therein;
- a flexing layer connected to the base and disposed over the opening;
- a first layer of insulator disposed on the flexing layer;
- a monocrystalline silicon resistive region deposited on the first layer;
- a second layer of electrically-insulating material disposed over the resistive region;
- and
- electrical connections to the resistive region at at least a first and second contact location.
A sensor for use at high temperatures comprising:
- a monocrystalline silicon base having an opening therethrough;
- an epitaxial silicon layer disposed over the opening and the base to thereby provide a pressure sensitive diaphragm or flexing layer;
- a first layer of silicon dioxide disposed on the epitaxial layer;
- a monocrystalline silicon resistor disposed on the first layer over the opening and extending to a first and a second contact region over the base;
- a second layer of silicon dioxide disposed over all of the resistor except the contact regions;
- and
- a first and second metal contacts disposed on the first layer and extending to the respective first and second contact regions to thereby provide electrical connections to the resistor.
Dependencies are inferred from the claim text.