US 4,904,934 AGranted

Testing apparatus for semiconductor devices

AssigneeMitsubishi Denki Kabushiki Kaisha

InventorsRyouji Nishihashi, Kiyoji Imanaka, Katsuji Kawaguchi, Hidekazu Iwasaki

Life of this patent

Estimating the term…

Loading patent…

Abstract

A testing apparatus includes a turntable, a driving device for rotating the turntable by a predetermined angle, and a plurality of pallets symmetrically fixed on the turntable around a center of rotation of the turntable. Each pallet holds a plurality of semiconductor devices and has electrode patterns for connection to leads of the semiconductor devices. A tester for testing the semiconductor devices is electrically connected with the electrode patterns of one of the pallets located at a first position in the rotation of the turntable by a connecting device. An exchanging device exchanges the semiconductor devices for new ones on one of the pallets located at a second position in the rotation of the turntable. A cover covers the turntable except around the second position. A heating device heats the inside of the cover to maintain the semiconductor devices held on the pallets in the cover at a high temperature.

Claims13

Dependent claims

A testing apparatus comprising:

a plurality of pallets, each of said pallets having a plurality of electrode patterns and a plurality of supports, each of which supports a semiconductor device and electrically connects the semiconductor device to one of said electrode patterns;
pallet moving means for moving said pallets along a path having a plurality of positions, the positions including a testing position and an exchanging position;
a tester for testing the semiconductor devices;
a plurality of contacts electrically connected to said tester;
connecting means for electrically connecting said contacts to said electrode patterns for electrically connecting a plurality of the semiconductor devices on a pallet at the testing position to the tester at the same time;
heating means for heating the semiconductor devices to a prescribed testing temperature;
and
exchanging means for exchanging the semiconductor devices on the pallet at the exchanging position with other semiconductor devices.

5 more elements

Dependencies are inferred from the claim text.