Process for producing monosilane

A process for producing a monosilane, which consists essentially of:

• disproportionating an alkoxysilane of the formula:
• H.sub.n Si(OR).sub.4-n (I)
• wherein R is an alkyl group having from 1 to 6 carbon atoms or a cycloalkyl group having up to 6 carbon atoms and n is an integer of 1, 2 or 3, in the presence of a catalyst, said catalyst comprising at least one compound selected from the group consisting of aromatic alkoxides of the formula:
• MOAr (II) wherein M is a metal of group Ia of the Periodic Table and Ar is a substituted or unsubstituted aromatic hydrocarbon group, quaternary ammonium compounds of the formula R.sup.1 R.sup.2 R.sup.3 R.sup.4 NX or phosphonium compounds of the formula:
• R.sup.1 R.sup.2 R.sup.3 R.sup.4 PX wherein each or R.sup.1 through R.sup.4, which may be the same or different, is a substituted or unsubstituted alkyl or aryl group and X is an anion;
• and purifying the monosilane produced.