Inner core heating in fluidized bed
AssigneeUnion Carbide Chemicals and Plastics Company Inc.
InventorsArun Acharya, William E. Be Vier
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Abstract
An improved heated fluidized bed reactor and a method of heating such reactor wherein a means defining an annular heated fluidized bed reaction zone is heated by a first heat source supplying heat to the outer periphery of the fluidized bed reaction zone and a second heat source supplying heat to the inner boundary of the annular fluidized bed reaction zone. The present invention is useful for reactions carried out in a fluidized bed reactor, such as the pyrolysis of silane containing gas into silicon.
Claims14
A heated fluidized bed reactor comprising:
- (a) a vessel;
- (b) a heated fluidized bed within an annular reaction zone located within the vessel and defined by an outer periphery means and an inner boundary wall, said inner boundary wall also defining and bounding an inner cavity, said inner boundary wall excluding said fluidized bed from within said inner cavity, said annular reaction zone being the only site within the vessel in which the fluidized reaction occurs and said annular reaction zone having no communication with said inner cavity;
- (c) means for heating the reaction zone including a first heat source means for supplying heat to the outer periphery means of the fluidized bed reaction zone, and a second heat source means for supplying heat to the inner boundary wall of the fluidized bed reaction zone;
- and
- (d) a fluidizing means for providing fluidization in the reaction zone.
A heated fluidized bed reactor used for the production of high purity polycrystalline silicon by pyrolyzing a silane containing gas comprising:
- (a) a vessel;
- (b) a heated fluidized bed within an annular reaction zone located within the vessel and defined by an outer periphery means and an inner boundary wall, said inner boundary wall also defining and bounding an inner cavity, said inner boundary wall excluding said fluidized bed from within said inner cavity, said annular reaction zone being the only site within the vessel in which the fluidized reaction occurs and said annular reaction zone having no communication with said inner cavity;
- (c) means for heating the reaction zone including a first heat source means for supplying heat to the outer periphery means of the annular fluidized bed reaction zone, the outer periphery means ranging in diameter from about 38 cm to about 69 cm, and a second heat source means for supplying heat to the inner boundary wall of the annular fluidized bed reaction zone, the inner boundary wall ranging in diameter from about 20 cm to about 30 cm;
- and
- (d) a fluidizing means for providing fluidization in the reaction zone.
A method of heating an annular fluidized bed within a reaction zone included within a vessel, said reaction zone being defined by an inner boundary wall and an outer periphery means, said inner boundary wall also defining and bounding an inner cavity, said inner boundary wall also excluding said fluidized bed from within said inner cavity, comprising;
- (a) supplying heat to the outer periphery means of the annular fluidized bed reaction zone;
- and
- (b) supplying heat to the inner boundary wall of the annular fluidized bed reaction zone, wherein the said annular fluidized bed reaction zone is the only site within the vessel in which the fluidized reaction occurs and wherein said annular reaction zone has no communication with said inner cavity.
Dependencies are inferred from the claim text.