Photo-enhanced pyrolytic MOCVD growth of group II-VI materials
AssigneeRaytheon Company
InventorsJames Elliott, William E. Hoke, Vilnis G. Kreismanis
Life of this patent
Estimating the term…
Abstract
A photo-enhanced pyrolytic technique for growing Group II-VI materials is described. Reactant vapors preferably low stability reactant vapors which form Group II-VI materials at relatively low temperatures are introduced into a reactor vessel. Disposed in the reactor vessel is a substrate which is heated to a growth temperature of generally less than about 400.degree. C. The surface of the substrate is illuminated by ultraviolet radiation and during pyrolytic decomposition of the vapors introduced to the growth vessel, the surface kinetic energy of migrating species on the surface of the substrate is increased by the radiation resulting in a reduction in defect levels in the material grown over the substrate.
Claims4
A method of providing layer comprising mercury cadmium telluride, over a substrate comprises the steps of:
- directing a flow of cadmium organic towards the substrate, said substrate being disposed at an elevated temperature of less than about 400.degree. C.;
- directing mercury towards said substrate;
- directing a flow comprising a tellurium organic towards towards the substrate, said tellurium organic having at least one organic group selected from the group consisting of a secondary alkyl, a tertiary alkyl, an allyl, a benzyl, or a cycloallyl group bonded directly to the tellurium atom;
- and
- pyrolyzing said flows by thermally decomposing the organics at the substrate to form the mercury cadmium telluride layer on the substrate while illuminating the substrate with a source of radiation having an intensity in the range of 0.1 w/cm.sup.2 to 1 w/cm.sup.2 over a wavelength range of about 250 nm to 1200 nm to increase the surface energy of cadmium, mercury, and tellurium from the pyrolyzed flows as the layer of mercury cadmium telluride is formed.
Dependencies are inferred from the claim text.