Vacuum pump
AssigneeHitachi, Ltd.
InventorsTakashi Nagaoka, Ichiro Gyobu, Kimio Muramatsu, Keiji Ueyama, Masahiro Mase, Yoshihisa Awada, Akira Nishiuchi
Life of this patent
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Abstract
A vacuum pump with a heating portion for preventing adhesion of reaction products on a discharge side thereof.
Claims15
A vacuum pump comprising a housing having a suction port, an exhaust path, a rotor rotatably supported inside said housing, means for elevating a temperature and pressure of a process gas sucked from said suction port from compression of the process gas, means for discharging the process gas from said exhaust path reduced in pressure to near the atmospheric pressure, means for preventing adhesion of the solid reaction product in the discharging means including heating means disposed in said exhaust path for heating the solid reaction product.
A vacuum pump comprising a housing including a suction port and an exhaust path, a rotor rotatably supported inside said housing, and means for sequentially compressing a process gas sucked from said suction path and discharging the same from said exhaust path at a pressure near to atmospheric pressure, the improvement comprising:
- a solid reaction product prevention means including a heating means and a temperature detector means for detecting a temperature of said heating means, said heating means and said temperature detector means being disposed in said exhaust path;
- a heat source connected to said heating means;
- means for adjusting a supply quantity of said heat source;
- a temperature setter;
- and
- control means for controlling said heat supply quantity adjustment means by a set temperature from said temperature setter and a detected temperature from said temperature detector means so that reaction products of the process gas are prevented from adhering to the exhaust path.
A vacuum pump comprising a housing including a suction port, an exhaust path, a rotor rotatably supported inside said housing, and means for compressing a gas sucked from said suction port and for discharging the compressed gas from said exhaust path near to the atmosphere, the improvement comprising:
- means for preventing adhesion of a solid reaction product of the process gas including a heating means and temperature detector means for detecting a temperature of said heating means, each being disposed in said exhaust path, said heating means is disposed on an inner surface of said exhaust path;
- a heat source connected to said heating means, said heat source is a high temperature fluid source, said heating means includes a tubular member having a space into which a high temperature fluid from said high temperature fluid source is supplied;
- means for adjusting a supply quantity of said heat source including a valve means;
- a temperature setter;
- and
- control means for controlling said heat supply quantity adjustment means by a set temperature from said temperature setter and a detected temperature from said temperature detector means.
A vacuum pump for treatment of a process gas, the vacuum pump comprising means for sequentially compressing the process gas and discharge means for discharging the compressed gas elevated in temperature and pressure while allowing said compressed process gas to be cooled and to be reduced in pressure to around atmospheric pressure, means for preventing adhesion of a solid reaction product of a process gas comprising a heating means provided on said discharge means for preventing the compressed process gas passing through said discharge means from being cooled thereby preventing the solid reaction products of said process gas from adhering to said discharge means.
An apparatus for treatment of a process gas, the apparatus comprising means for elevating a temperature and pressure of the process gas through compression of the process gas, and a gas flow path of said apparatus causing said process gas, elevated in temperature and pressure, to cool in temperature and to be reduced in pressure, means for preventing adhesion of a solid reaction product formed by the compressed process gas when said compressed processed gas flows in said gas flow path including heating means provided in said gas flow path.
Dependencies are inferred from the claim text.