Piezoelectric valve

A piezoelectric valve for controlling fluid flow through a valve port and a second valve port, comprising:

• (A) a fluid-tight valve body defining a valve port and a second valve port aligned with said valve port, said valve port being an inlet port and said second valve port being an exhaust port;
• (B) a diaphragm disposed within said valve body and including at least a pair of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to said valve port and said second valve port, said members in one of said positions operatively blocking said valve port and operatively unblocking said second valve port and in the other of said positions operatively unblocking said valve port and operatively blocking said second valve port, said valve port extending through one of said pair of said members, and the other of said pair of said members having a first face for selectively blocking or unblocking said valve port and an opposed second face for selectively blocking or unblocking said second valve port;
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• (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions.

A piezoelectric valve for controlling fluid flow through a valve port, comprising:

• (A) a fluid-tight valve body defining a pair of spaced and generally opposed valve ports;
• (B) a diaphragm including at least a pair of piezoelectric members and a flow channel means disposed between and spacing said members apart, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to one of said valve ports, said members in one of said positions operatively blocking said one valve port and in the other of said positions operatively unblocking said one valve port, said valve body precluding the excursion of one of said members in a given direction and thereby substantially doubling the effective excursion of the other of said members in the opposite direction, at least one of said members being physically disposed intermediate said pair of valve ports;
• and
• (C) electrical means operatively connected to said members for piezoelectrically deflecting the same to one of said positions, said electrical means being functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of both of said members, said members being substantially planar when not piezoelectrically deflected and substantially curved when piezoelectircally deflected.

A piezoelectric valve for providing three-way valve action for controlling a fluid flow among first, second and third valve ports, comprising:

• (A) a fluid-tight valve body defining first, second and third valve ports;
• (B) a diaphragm disposed within said valve body and including at least a pair of piezoelectric members, said members being selectively piezoelectrically deflectable in opposite directions in a plane of operation thereof in response to voltages applied thereto to produce a cumulative excursion to selectively assume one of two functionally opposite positions relative to first said valve port and said second valve port, said members in one of said positions operatively blocking said first valve port and operatively unblocking said second valve port and in the other of said positions operatively unblocking said first vale port and operatively blocking said second valve port, said first valve port being an inlet port extending through a central portion of said one member, said second valve port being an exhaust port aligned with said first valve port, and said third valve port being an inlet/outlet port in fluid communication with the periphery of said members and with one of said first and second valve ports when the same is unblocked, said other member having a first face for selectively blocking or unblocking said first valve port and an opposed second face for selectively unblocking or blocking said second valve port;
• (C) electrical means operatively connected to said members for piezoelectrically deflecting the same, said electrical means being functionally electrically connected to a common electrical circuit for simultaneous piezoelectric deflection of both of said members, said members being substantially planar when not piezoelectrically deflected and substantially curved when piezoelectrically deflected;
• (D) means for biasing said members towards said first valve port
• (E) means for securing a central annular portion of said one member to said valve body about said first valve port to preclude excursion of said one member in a given direction and thereby to substantially double the effective excursion of said other member in the opposite direction;
• and
• (F) flow channel means disposed between and spacing said members apart comprising a convoluted washer disposed in said diaphragm intermediate said members to enable the flow of fluid intermediate said members between the center thereof and the periphery thereof;
• said valve thereby providing fluid communication between said third valve port and an unblocked one of said first valve port and said second valve port.