Method and apparatus for cutting a cylindrical material
AssigneeTokyo Seimitus Co., Ltd.
InventorsKatsuo Honda, Shuichi Tsukada
Life of this patent
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Abstract
Method and apparatus for cutting a cylindrical material formed of silicone or the like which is an original material to produce semiconductor devices, using a rotary blade. In the cutting method, the base end side of the cylindrical material is fixed and at the same time, before the cutting of the cylindrical material is started, the cutting side of the cylindrical material is also fixed according to the shape thereof. The cutting is performed while maintaining such fixed conditions until the cutting is completed.
Claims13
A method of cutting a cylindrical material, comprising the steps of:
- fixing a base end side of said cylindrical material;
- locating a plurality of forwardly and backwardly movable keep pins such that said keep pins are opposed to an end face of a cutting side of said cylindrical material;
- pressing said plurality of keep pins against said end face of said cylindrical material before the cutting of said cylindrical material is started;
- thereafter fixing said keep pins immovable;
- attracting said end face of said cylindrical material cutting side toward said keep pins to thereby fix said end face;
- and, cutting said cylindrical material by a rotating blade while fixation of said end face is maintained until the cutting of said cylindrical material is completed.
A method of cutting a cylindrical material, comprising the steps of:
- fixing a base end side of said cylindrical material;
- arranging a plurality of cylinders opposed to an end face of a cutting side of said cylindrical material, said cylinders having adsorbing pads on pistons of each cylinder for attracting said cylindrical material through means of spherical surface bearings;
- operating said plurality of cylinders to press said adsorbing pads against said end face of said cylindrical material, before the cutting of said cylindrical material is started;
- thereafter, after the pressing forces applied to said adsorbing pads by said cylinders are removed, with said adsorbing pads being adsorbed to said cylindrical material end face, fixing said pistons of said cylinders such that they cannot be moved forwardly and backwardly;
- and, cutting said cylindrical material by a rotating blade.
An apparatus for cutting a cylindrical material in which a blade is rotated to cut the cylindrical material with a base end side thereof being fixed, characterized in that an end face of a cutting side of said cylindrical material is adsorbed and held by adsorbing and holding means before the starting of said cutting, and said cutting of said cylindrical material is performed while maintaining said adsorbing and holding state until said cutting is completed;
- wherein said adsorbing and holding means comprises:
- a plurality of slide members disposed opposed to said cutting side end face of said cylindrical material with the base end side thereof being fixed;
- attraction means for generating adsorbing forces so that said cutting side end face of said cylindrical material can be brought into contact with and held by leading ends of said plurality of slide members;
- a cylinder section interposed substantially centrally among said plurality of slide members and at least one piston slidable within said cylinder section;
- a plurality of clamp pins disposed so as to extend radially from said cylinder section toward said plurality of slide members;
- means responsive to the operation of said piston to transmit pressing forces to said plurality of clamp pins in such a direction in which said plurality of clamp pins press and fix said plurality of slide members;
- wherein said plurality of slide members are respectively fixed with said leading ends thereof being in contact with said cutting side end face of said cylindrical material in accordance with the shape of said end face.
An apparatus for cutting a cylindrical material in which a blade is rotated to cut said cylindrical material with a base end side thereof being fixed, said apparatus comprising:
- a plurality of cylinders arranged opposed to an end face of a cutting side of said cylindrical material with the base end side thereof fixed;
- pistons slidably disposed in said cylinders;
- adsorbing pads disposed on said pistons by means of spherical surface bearings, said adsorbing pads being provided in a top end portion thereof with a porous pad having an upper end surface which is formed flat;
- attraction means for allowing said adsorbing pads to generate adsorbing forces;
- and
- means for fixing said respective pistons such that they are unable to advance and retreat, characterized in that, with said adsorbing part being adsorbed to the end face of said cylindrical material, said pistons of said cylinders are fixed respectively.
An apparatus for cutting a cylindrical material in which a blade is rotated to cut said cylindrical material with a base end side thereof being fixed, said apparatus comprising:
- a plurality of cylinders arranged opposed to an end face of a cutting side of said cylindrical material with the base end side thereof fixed;
- pistons slidably disposed in said cylinders;
- adsorbing pads disposed on said pistons by means of spherical surface bearings;
- attraction means for allowing said adsorbing pads to generate adsorbing forces;
- and,
- means for fixing said respective pistons such that they are unable to advance and retreat, characterized in that, with said adsorbing part being adsorbed to the end face of said cylindrical material, said pistons of said cylinders are fixed respectively.
Dependencies are inferred from the claim text.