Electrostatic capacity type pressure detector
AssigneeFuji Electric Co., Ltd.
InventorsMitsuru Tamai, Kimihiro Nakamura, Teizo Takahama, Mikihiko Matsuda
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Abstract
An electrostatic capacity type pressure detector having a central diaphragm, which is deformed by pressure, and a fixed electrode on each side of the diaphragm. Each of the fixed electrodes includes a first electrically conductive plate confronting the diaphragm, an insulating plate joined to the first conductive plate, and a second electrically conductive plate joined to the first plate. An annular support joined to the diaphragm and to the insulating plate surrounds but is insulated from the first electrically conductive plate. A hole in the electrode introdues pressure into a space defined by the electrode and the diaphragm.
Claims7
An electrostatic capacitance type pressure detector comprising:
- a diaphragm deformable by pressure;
- a pair of fixed electrodes, each electrode including a pressure introducing hole for introducing pressure into a space defined by said electrode, said pressure introducing hole, and said diaphragm, each of said holes having an inner wall, a different one of said fixed electrodes being provided on each side of said diaphragm, and being separated therefrom by a predetermined distance to form a respective capacitance between said diaphragm and each of said fixed electrodes, each of said fixed electrodes including:
- a first electrically conductive plate confronting said diaphragm and separated therefrom by a gap;
- an insulating plate having a first side joined to said first electrically conductive plate and a second side;
- and
- a second electrically conductive plate joined to said second side of said insulating plate;
- conductor means for electrically connecting said first electrically conductive plate and said second electrically conductive plate;
- and
- an annular support joined to said diaphragm and to said insulating plate so as to surround said first electrically conductive plate, said annular support being electrically insulated from said first electrically conductive plate.
Dependencies are inferred from the claim text.