Multipactor pressure gauge for use as a noninvasive vacuum tube sensor
AssigneeUniversity of Utah
InventorsMichael B. Kenny, Larry R. Barnett, Richard W. Grow, J. Mark Baird
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Abstract
A gas ionization type vacuum gauge for testing the internal vacuum levels to below 10.sup.-6 torr is disclosed which uses a multipactor discharge means as the source for the electron current used to ionize residual gas molecules. The invention comprises an RF field enhancing cavity which can be constructed of high-vacuum-compatible materials, able to withstand bake-out microwave temperatures and a negatively biased ion collection wave, wire, or grid. A simple ceramic RF feed-through permits simple and noninvasive pressure measurements. The device can be made much smaller than conventional gauges.
Claims6
An apparatus for testing vacuum levels comprised of a re-entrant cavity resonator within which is located, at both ends of said resonator, a highly capacitive post with capacitive surfaces constructed from material compatible with the type of environment being tested, between said posts there existing a gap;
- between said posts there being disposed a RF field to obtain a multipactor discharge between said highly capacitive re-entrant cavity post surfaces;
- and a negatively biased wire, or wires or a grid, disposed between, but not in contact with said post surfaces, for collection of residual gas ions formed by collision with primary electrons produced by said multipactor discharge, thereby producing a measurable electric current which is a function of vacuum pressure.
Dependencies are inferred from the claim text.