Preservation of surface features on semiconductor surfaces
AssigneeAmerican Telephone and Telegraph Company, AT&T Bell Laboratories
InventorDaniel P. Wilt
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Abstract
The integrity of surface structural features (e.g., distributed feedback gratings) in Group III-V compound semiconductors are preserved during heating (e.g., subsequent LPE regrowth) by a thin coating containing a transition metal (e.g., Os, Ru or Rh). DFP-DCPBH InP/InGaAsP single frequency lasers made in this way are also described.
Claims17
A method of manufacturing a device, which includes a Group III-V compound semiconductor body having a raised or depressed structural surface feature, comprising the steps of protecting the feature from substantial deterioration during heat treatment by applying to at least the feature a thin protective coating containing a transition metal, and subsequently subjecting the body to heat treatment.
In a method of fabricating a laser, the steps comprising:
- providing an InP body,
- forming an optical grating on the body,
- forming a thin protective coating containing a transition metal on the grating, and
- epitaxially growing on the grating a heterostructure which includes a plurality of layers of InP and/or InGaAsP.
Dependencies are inferred from the claim text.