Trace element spectrometry with plasma source
AssigneeHitachi, Ltd.
InventorsYukio Okamoto, Makoto Yasuda, Seiichi Murayama, Masataka Koga
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Abstract
A plasma trace element spectrometer comprises a microwave generator for generating microwave power, a microwave feeder for guiding and transforming the generated microwave power into microwave power of TE.sub.01 mode and supplying the microwave power of TE.sub.01 mode, a plasma producer having, at one end, an introduction port for a carrier gas and a sample and at the other end an opening and being cooperative with the supplied microwave power of TE.sub.01 mode to produce plasma of the carrier gas and sample introduced through the introduction port, and a spectrometer for analyzing constituent elements of the sample by measuring the produced plasma by way of the opening.
Claims6
A plasma trace element spectrometer comprising:
- microwave generation means for generating microwave power;
- microwave feed means for guiding and transforming the generated microwave power into microwave power of TE.sub.01 mode and supplying the microwave power of TE.sub.01 mode;
- plasma production means having, at one end, an introduction port for a carrier gas and a sample and at the other end an opening and being cooperative with the supplied microwave power of TE.sub.01 mode to produce plasma of the carrier gas and sample introduced through said introduction port;
- and
- spectrometer means for analyzing constituent elements of said sample by measuring the produced plasma by way of said opening.
Dependencies are inferred from the claim text.