Image sensor with reduced surface reflection interference
AssigneeSeiko Instruments Inc.
InventorsSatoshi Machida, Yukito Kawahara, Hiroshi Mukainakano
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Abstract
A photo-electro conversion sensor of the image sensor is covered with a single layer passivation film or a multi-layer passivation film composed of plural layers having the substantially same refractive indexes, and the thickness of the passivation film is arranged some ten times as much as the wavelength of incident light so as to eliminate interference.
Claims15
An image sensor for converting an optical signal into an electric signal, comprising:
- a photo-electro conversion element for effecting photo-electro conversion;
- and
- a passivation film covering the photo-electro conversion element, the passivation film having a thickness more than ten times the wavelength of incident light to be irradiated onto the photo-electro conversion element, and the passivation film being composed of at least a resin layer.
An image sensor for converting an optical signal into an electric signal, comprising:
- a photo-electro conversion element for effecting photo-electro conversion, the photo-electro conversion element comprising a semiconductor substrate having a photo-electro conversion region formed therein;
- and
- a passivation film covering the photo-electro conversion element, the passivation film having a thickness more than ten times the wavelength of incident light to be irradiated onto the photo-electro conversion element, the passivation film being composed of a single layer or a plurality of layers having substantially the same refractive indexes.
An image sensor for converting an optical signal to an electrical signal, comprising:
- photo-electro converting means having a light-receiving surface for converting incident light of a given wavelength to an electrical signal;
- and a passivation film disposed on the light-receiving surface, the passivation film having a thickness more than ten times greater than the given wavelength of the incident light, and the passivation film being composed of at least a resin layer transparent to incident light of the given wavelength.
Dependencies are inferred from the claim text.