Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier

A water probing machine fitted with a handling apparatus for a wafer carrier, comprising:

• a testing section where a multitude of probes are brought into contact with the pads of a device circuit of semiconductor wafers to pass an electric current to the device circuit under test;
• a loading/unloading section provided adjacent to said testing section, for automatically taking the semiconductor wafers into and out of said testing section one after another;
• and
• means for transferring the semiconductor wafers between said loading/unloading section and said testing section, and
• including:
• a sampling case mounted to said loading/unloading section and having formed therein a first opening communicating with the outside of said loading/unloading section and a second opening communicating with the interior of said loading/unloading section;
• a drawer adapted to go into and out of said sampling case through the first opening;
• means for guiding said drawer between the first opening and the second opening of said sample case;
• a carrier which is loaded on said drawer and used to hold one semiconductor wafer at a time comprising:
• a tray means for loading thereon the semiconductor wafer submitted to processing, said tray means having a groove which is formed therein for unloading the semiconductor wafer therefrom;
• and
• means for positioning said tray means relative to a predetermined location of the drawer,
• whereby, when the carrier having the semiconductor wafer mounted thereon is inserted into the sampling case through the first opening, only the semiconductor wafer is transferred to the loading/unloading section through the second opening by the transferring means.