Method of heating a quartz glass tube
AssigneeSumitomo Electric Industries, Ltd.
InventorsGotaro Tanaka, Hiroshi Suganuma, Akira Urano, Masahiro Takagi, Shunichi Mizuno
Life of this patent
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Abstract
A method of heating a quartz glass tube with microwaves, which method comprises supplying a gas for plasma generation in the quartz glass tube, applying microwaves to the quartz glass tube so as to generate a hot plasma in the quartz glass tube and to preheat the quartz glass tube, and then discontinuing the supply of the gas for plasma generation while applying the microwaves, whereby the quartz glass tube absorbs the microwaves to heat the quartz glass tube to a sufficient temperature in a very quick and clear manner.
Claims8
A method of heating a quartz glass tube with microwaves, which method comprises supplying a gas for plasma generation in the quartz glass tube, applying microwaves to the quartz glass tube so as to generate a hot plasma in the quartz glass tube and to pre-heat the quartz glass tube to a temperature whereby microwaves are absorbed by the tube, and then discontinuing the supply of the gas for plasma generation while continuing to apply the microwaves, whereby causing the quartz glass tube to absorb the microwaves to heat the tube.
Dependencies are inferred from the claim text.