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US 4,900,892 AGranted
Method for working members composed of oxide material
AssigneeSiemens Aktiengesellschaft
InventorsDieter Baeuerle, Michael Eyett, Helmut Thomann, Wolfram Wersing
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Abstract
A method for working an oxide material, and preferably a ceramic oxide material, with a laser emission of an excimer laser and without the creation of damage layers includes pulsing the laser emission to be impinged on the material to be worked.
Claims5
A method for working members composed of a perovskite material selected from the group consisting of lead-, calcium-, barium-, titanate, -zirkonate, -tantalate, and high-temperature superconductor material, comprising the steps of:
- directing a laser emission having a wavelength in air of less than approximately 350 nm onto a processing zone of a member to be worked;
- pulsing the laser emission so that only pulses of laser energy impinge the member to be worked;
- and
- relating a pulse duration, a pulse repetition rate and a pulse energy to one another so that significant harmful heat accumulation is avoided in the member to be worked in a near region of a processing zone.
1 more element
Dependencies are inferred from the claim text.