Chemical process for obtaining high purification of monoalkylarsines and dialkylarsines and purified mono- and dialkylarsines
AssigneeCVD Incorporated
InventorsBenjamin C. Hui, Ravindra K. Kanjolia, Jorg Lorberth
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Abstract
A method is provided for highly pure mono- and dialkylarsines, particularly removing substantially all silicon-containing impurities. A mono- or dialkylarsine is reacted with either an alkali metal or an alkali metal hydrocarbyl, thereby producing an alkali metal alkylarsenide. Silicon, germanium, zinc and other metallic impurities are removed from the alkali alkylarsenide. Mono- and dialkylarsine is then regenerated by reaction of the alkali metal alkylarsenide with a proton donor.
Claims7
A method for obtaining a mono- or a dialkylarsine that is highly purified with respect to levels of silicon, germanium and zinc, the method comprising,
- in a non-proton donor organic solvent and in the absence of oxygen, reacting a mono- or dialkylarsine with either an alkali metal or a mixture of alkali metals or an alkali metal hydrocarbyl or mixed alkali metal hydrocarbyl to produce an alkali metal mono- or dialkylarsenide,
- using heat and/or vacuum, removing by vaporization silicon-containing, germanium-containing and zinc-containing impurities,
- in a non-proton donor organic solvent and in the absence of oxygen, regenerating said mono- or dialkylarsine by reacting said alkali metal mono- or dialkylarsenide with a proton donor selected from the group consisting of acids, alcohols and water,
- separating said non-proton donor organic solvent which contains said regenerated mono- or dialkylarsine from any solid residue, and
- removing said solvent from said regenerated mono- or dialkylarsine.
Dependencies are inferred from the claim text.