Solar battery
AssigneeFuji Electric Corporate Research and Development Ltd.
InventorsKazusue Itoga, Takeshige Ichimura
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Abstract
A method of manufacturing a high efficiency solar battery and a high efficiency solar battery comprising a transparent electrode of SnO.sub.2, and a semiconductor layer and a metal electrode formed on the transparent electrode in the stated order. The surface unevenness of the transparent electrode is controlled by forming a dual layer structure. The layer adjacent the transparent substrate comprises an undoped SnO.sub.2 layer, having crystal grains growing substantially perpendicular to the substrate, producing an uneven surface. A doped layer containing impurities, such as F, Cl, and Sb is deposited over the undoped layer.
Claims2
A solar battery comprising a transparent electrode formed on a substrate and a semiconductor film and a metal electrode formed on said transparent electrode in the stated order, characterized in that said transparent electrode comprises an impurity undoped tin oxide layer of a thickness from 0.08 to 0.2 .mu.m formed on said substrate and an impurity doped tin oxide layer formed on said undoped layer.
Dependencies are inferred from the claim text.