Method of preferentially removing oxygen from ozonated water
AssigneeArrowhead Industrial Water, Inc.
InventorsGregory A. Pittner, Larry L. Crabtree
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Abstract
Ozonated water may desirably have the concentration of oxygen present reduced by agitating the water at less than atmospheric pressure to remove dissolved gases. Substantially more oxygen may be removed from the water than ozone by this technique, to provide a product water which has advantages of use in electronic manufacturing operations.
Claims15
The method of preferentially removing oxygen from water which contains a mixture of oxygen and ozone as dissolved gases, which method comprises agitating said water while exposed to a gas phase at less than atmospheric pressure, to remove the dissolved gases from the water, whereby substantially more oxygen is removed from the water than ozone.
A deoxygenation method including the steps of intimately mixing with water a mixture comprising ozone and oxygen as dissolved gases, whereby the resulting product water contains no more than about 10 parts by weight of oxygen per 1 part by weight of ozone present, at least 10 p.p.b. ozone being present, and thereafter agitating said product water in contact with a gas phase at less than atmospheric pressure to remove the dissolved gases from the water by boiling, whereby substantially more oxygen is removed from the water than ozone.
Dependencies are inferred from the claim text.