Coating device
AssigneesTokyo Electron Limited, Tel Kyushu Limited
InventorsTakayuki Toshima, Osamu Hirakawa
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Abstract
A coating device includes a ring-shaped outer circumferential groove formed along and adjacent to the outer circumferential rim of a cup means and communicated with a processing vessel, and a processing liquid supply source connected to the outer circumferential groove through nozzles. A partition wall is erected, as an inner wall of the cup means, inside the outer circumferential groove with the nozzles and a groove interposed between them. The supply of the processing liquid can be thus made stable and processing failure because of air bubbles mixed in the liquid and irregular coating of the liquid on substrates can be prevented.
Claims10
A coating device comprising:
- a cup means having an opening through which substrates to be processed are mounted in and out of the cup means and serving to form a processing vessel with its bottom sealingly contacted with the underside of the substrate to be processed;
- a ring-shaped outer circumferential groove formed in the circumferential wall of said cup means and communicated with the processing vessel;
- a plurality of nozzles each connected to a processing liquid supply source at one end thereof and also connected to the outer circumferential groove, said nozzles being arranged along the inner circumferential rim of the outer circumferential groove at a certain interval;
- and
- a partition wall erected to form an inner wall of the cup means, facing said nozzles with a certain interval interposed between them.
Dependencies are inferred from the claim text.