Liquid level detector and method for a vapor deposition container
AssigneeSemi-Gas Systems, Inc.
InventorEdward Kulha
Life of this patent
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Abstract
An optical probe is sealingly mounted in an access port of a pressurized container. The probe comprises a glass rod of a predetermined thickness having a conical end tip. An optical transmitter and receiver is connected to the glass rod. The fiber optic transmitter and receiver sends visible red light down the glass rod. When the liquid level inside the container drops below the end tip of the glass rod, reflected light will be received from the glass rod and detected.
Claims10
A liquid level detector for a vapor deposition container comprising:
- a pressurized container for storing a supply of liquid chemical, the container having an inlet port for delivering a carrier gas to said liquid, and having an outlet port for discharging said carrier gas;
- a glass rod having no outer cladding, extending through and hermetically sealed to the container, the rod having a conically shaped end;
- and
- a fiber optic transmitter and receiver optically connected to the glass rod for transmitting a beam of light and for detecting a reflected light beam when said glass rod is not in contact with said liquid.
A liquid level detector for a vapor deposition container comprising:
- a pressurized container for storing a supply of liquid chemical, the container having an inlet port for delivering a carrier gas to said liquid, an outlet port for discharging said carrier gas, and a chemical fill port;
- a plug shaped to fit over and hermetically seal with said chemical fill port;
- a glass rod having no outer cladding, extending through and hermetically sealed to said plug, said rod having a conically shaped end;
- and
- a fiber optic transmitter and receiver optically connected to the glass rod for transmitting a beam of light and for detecting a reflected light beam when said glass rod is not in contact with said liquid.
A method for detecting the liquid level in a vapor deposition container comprising the steps of:
- filling a pressurized container with a liquid chemical;
- conducting a carrier gas through said liquid chemical in the container;
- generating a beam of light;
- conducting said beam of light inside said container by means of a glass rod, said glass rod having no outer cladding;
- directing said beam of light to a tip of said glass rod, said tip being of conical shape;
- reflecting said beam of light back along said glass rod if said liquid is not in contact with said tip;
- and
- detecting said beam of light outside said container and sending a signal to a warning device if a predetermined period of time has passed since said beam of light has been detected.
Dependencies are inferred from the claim text.