Apparatus for removing pellicles

An apparatus for removing a pellicle of the type having a generally rectangular frame bonded to a first surface of a photomask with a layer of adhesive, said rectangular frame including two long sides, said apparatus comprising:

• a housing having a generally planar upper surface for supporting the first surface of the photomask, said upper surface including an aperture to accommodate the pellicle when the photomask is placed on said upper surface;
• stop means disposed on said upper surface for preventing lateral and longitudinal displacement of the photomask on said upper surface;
• a carriage longitudinally moveable within said housing in a direction parallel to said upper surface;
• a blade adjustably mounted on said carriage having a cutting edge generally parallel to said upper surface, said blade selectively positionable on said carriage so that said cutting edge is rigidly positioned immediately below said upper surface of said housing so as to intercept the layer of adhesive between the first surface of the photomask and the frame of the pellicle;
• drive means for moving said carriage so that said blade is translated parallel to said upper surface along a path between the photomask and one of the long sides of the pellicle frame.

An apparatus for removing a pellicle of the first type having a generally circular frame bonded to a first surface of a photomask with a layer of adhesive, said generally circular frame having two diametrically opposing curved sides joined by two flats, said apparatus comprising:

• a housing having a generally planar upper surface for supporting the first surface of the photomask, said upper surface including an aperture to accommodate the pellicle when the photomask is placed on said upper surface;
• stop means disposed on said upper surface for preventing lateral and longitudinal displacement of the photomask on said upper surface;
• a carriage rotatable within said housing in a plane parallel to said upper surface;
• a blade adjustably mounted on said carriage having a cutting edge generally parallel to said upper surface, said blade selectively positionable on said carriage so that said cutting edge is rigidly positioned immediately below said upper surface of said housing so as to intercept the layer of adhesive between the first surface of the photomask and the frame of the pellicle;
• drive means for rotating said carriage so that said blade is translated parallel to said upper surface along a semi-circular path between the photomask and one of the curved sides of the pellicle frame.

A method for removing a pellicle of the type having a perimeter frame bonded to a first surface of a photomask with a layer of adhesive comprising the steps of:

• (a) placing the photomask in a housing with the first surface of the photomask supported by an upper surface of said housing;
• (b) securing the photomask in said housing so as to prevent lateral and longitudinal displacement of said photomask;
• (c) positioning a blade rigidly in a movable carriage of said housing so that a cutting edge of said blade is positioned immediately below said upper surface of said housing so as to intercept the layer of adhesive between the perimeter frame and the first surface of the photomask;
• and
• (d) moving said blade in a controlled manner such that said cutting edge is translated parallel to said upper surface along a path between the photomask and a portion of the perimeter frame of the pellicle;
• whereby said pellicle is separated from said photomask.