Radiation induced pattern deposition
AssigneeTexas Instruments Incorporated
InventorEliot V. Cook
Life of this patent
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Abstract
A system and method for forming a pattern, such as a layer of metallization, on a surface. A layer comprising patterning material is positioned next to a deposition surface and a portion of the layer is heated to deposit some of the patterning material on the surface. The invention provides a means for transferring a pattern under atmospheric temperature and pressure conditions.
Claims44
A method for forming a pattern of material on a deposition surface comprising the steps of:
- placing a layer, comprising a substrate having first and second sides and a sublayer of patterning material, next to the surface with the sublayer of patterning material positioned between the second side of the substrate and the deposition surface;
- introducing radiant or thermal energy to the layer from the first side of the substrate;
- and
- vaporizing a portion of the sublayer to deposit patterning material on the surface, said vaporization effected by thermally conducting said energy through the substrate.
A method for forming a pattern of material on a deposition surface comprising the steps of:
- placing a foil comprising patterning material and a matrix material next to the surface wherein the patterning material has a relatively low temperature of vaporization and the matrix material has a relatively high temperature of vaporization, said foil having a first side facing the deposition surface and a second side facing away from the deposition surface;
- introducing radiant or thermal energy from an external source to the second side of the foil;
- thermally conducting said energy from the second side of the foil to the first side of the foil;
- vaporizing the patterning material with said thermally conducted energy;
- and
- depositing a portion of the patterning material on the surface.
A method for forming a pattern of material on a first layer having a deposition surface with a radiation source comprising the steps of:
- placing a second layer comprising patterning material next to the surface;
- transmitting radiant energy from the source and through the first layer to the second layer to provide sufficient thermal energy with the transmitted radiant energy to vaporize some of the patterning material;
- and
- depositing a portion of the vaporized patterning material on the deposition surface.
A method of forming a pattern on a surface of a first layer having first and second sides facing away from one another comprising the steps of:
- placing a second layer comprising patterning material along the first side of the first layer, said second layer having a vaporization surface facing the first layer;
- transmitting radiation through the second side of the first layer, then through the first side of the first layer and to the second layer to impart thermal energy to the second layer, said energy sufficient to vaporize some of the patterning material from the vaporization surface;
- and
- condensing some of the vaporized patterning material on to the first side of the first layer.
Dependencies are inferred from the claim text.