Method of preparing metal carbides, nitrides, and the like
AssigneeSRI International
InventorRichard M. Laine
Life of this patent
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Abstract
A process is provided for the preparation of metals, metal carbides, nitrides, borides, silicides, sulfides and phosphides by low temperature pyrolysis of a selected organometallic precursor. The precursor, in addition to containing organic ligands, contains the metal M, which is a transition metal or tin, and the element X (C, N, B, Si, S, or P), which may be bound directly to M, contained within the ligands, or both. The process enables one to provide surface coatings or shaped articles of metals, metal carbides, nitrides, and the like.
Claims5
A method of producing a product M.sub.a X.sub.b wherein M represents one or more metals selected from the group consisting of transition metals and tin, X represents silicon, and a and b represent the atomic proportions of M and X, comprising the steps of, in sequence:
- (a) providing a precursor to M.sub.a X.sub.b that is non-volatile upon pyrolysis and which comprises an organometallic complex, said complex including one or more metal atoms M which may be the same or different, and wherein each of said metal atoms M is bound to an organic ligand, said organometallic complex further containing the element X either directly bound to one or more of said metal atoms M or contained within said ligands or both;
- (b) optionally either:
- (i) dissolving said precursor in an organic solvent to give a precursor solution, the solvent selected such that the precursor can be dissolved to a concentration at which the precursor solution has a viscosity sufficient to allow extrusion into a desired form;
- or
- (ii) melting said precursor;
- (c) shaping said precursor into a desired form;
- and
- (d) pyrolyzing said shaped precursor, at a temperature in the range of 500.degree. C. to 950.degree. C., to give M.sub.a X.sub.b as a residue substantially free of organic materials.
Dependencies are inferred from the claim text.