Micromechanical non-reverse valve
OwnerBertil Hok, Lars Tenerz +1inventors
InventorsBertil Hok, Lars Tenerz, Jonas Tiren
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Abstract
A silicon micromechanical non-reverse valve. In a main surface of a silicon wafer there is provided a cavity and a cantilever beam. The beam extends over the cavity and is integrally formed with the wafer at its top portion. The beam is provided at a distance above the bottom wall of the cavity. A second wafer of silicon or glass is provided over the first silicon wafer and covers the cavity in order to form a chamber. A second wafer is provided with two openings one of which is situated within the outline of the beam and the other of which is situated outside said outline. The first opening acts as an inlet and the second opening as an outlet for the valve.
Claims20
A silicon micromechanical non-reverse valve comprising
- a first silicon wafer having a cavity in one of its main surface and provided with a cantilever beam integral with the top portion of said first wafer, extending over said cavity and being arranged at a distance above the bottom wall of the cavity,
- and a second wafer made of a material selected from the group which consists of silicon and glass, said second wafer being provided over the first wafer and covering the cavity thereof in order to form a chamber, said second wafer being provided with two openings one of which is situated within the outline of the beam and the other being situated outside said outline, said first opening acting as an inlet and said second opening acting as an outlet for the valve.
Dependencies are inferred from the claim text.