Photo chemical reaction apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsKensaku Yano, Akihiko Furukawa, Ryohei Miyagawa, Yoshinori Iida
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Abstract
A photo chemical reaction apparatus comprises a vacuum container partitioned into a reaction chamber and a carrier chamber by use of partition board. The partition board has an opening into which a carrier tray can be detachably inserted so as to cause the rection chamber to be hermetically sealed. The carrier tray has a substrate holder opposite to a light-penetrating window. A reaction gas flows between this window and a substrate to be processed mounted on the substrate holder.
Claims12
A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising:
- a light source;
- movable carrier means for transporting workpieces to be photo chemically treated, including a carrier tray, having supporting means and a light-penetrating window for exposing a workpiece to the light source;
- and
- a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber.
A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising:
- a light source;
- movable carrier means for transporting workpieces to be photo chemically treated, including a plurality of carrier trays, each having supporting means and a light-penetrating window for exposing a workpiece to the light source;
- transport vacuum container means for isolating the plurality of carrier trays from the atmosphere;
- a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber connected to the transport vacuum container means for receiving a carrier tray therefrom without exposure to the atmosphere;
- and
- means for moving the carrier trays between the transport vacuum container and the carrier chamber.
Dependencies are inferred from the claim text.