Unitary push-pull force transducer

A force transducer capable of being attached between first and second structures for measuring a force exerted on the force transducer by the first and second structures, the force transducer comprising a unitary body formed from a crystalline substrate, the unitary body comprising:

• first and second mounting elements for mounting the force transducer to the first and second structures, respectively;
• first and second force sensing elements, each force sensing element having first and second ends, a line extending from the second end to the first end of each force sensing element defining a force sensing axis for the force sensing element, each force sensing element being sensitive to a force exerted in either direction along its force sensing axis, the force sensing elements being oriented with their force sensing axis parallel to and aligned with one another;
• and
• coupling means for interconnecting the mounting elements and force sensing elements, the coupling means comprising a first bridge member, first flexure means for connecting the first bridge member to the first mounting element, and second and third flexure means for connecting the first bridge member to the first ends of the first and second force sensing elements, respectively, a second bridge member, fourth flexure means for connecting the second bridge member to the second mounting element, fifth and sixth flexure means for connecting the second bridge member to the second ends of the first and second force sensing elements, respectively, all flexures permitting rotation of components to which they are attached about strain relief axes normal to a plane containing the force sensing axes, the flexures to which each bridge member is attached being spaced from one another along a transverse direction in said plane and normal to the force sensing axes, the second flexure being positioned between the first and third flexures along said transverse direction, the first flexure being positioned between the fourth and sixth flexures along said transverse direction, whereby a given force exerted on the mounting elements by the first and second structures causes the first and second bridge sections to pivot in opposite directions about the second and fifth flexures, respectively, producing a compression force on one force sensing element and a tension force on the other force sensing element.